This email address is being protected from spambots. You need JavaScript enabled to view it.
 
+7 (4912) 72-03-73
 
Интернет-портал РГРТУ: http://rsreu.ru

UDC 621.315.592, 621.317.08, 543.456

ANALYTICAL MEASURING COMPLEX FOR LOCAL INVESTIGATION OF CURRENT-VOLTAGE AND CAPACITANCE-VOLTAGE CHARACTERISTICS OF SEMICONDUCTORS

D. S. Kusakin, engineer RSREU; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. G. Litvinov, PhD, assistant professor RSREU; This email address is being protected from spambots. You need JavaScript enabled to view it.
A. V. Ermachikhin, PhD, senior researcher RSREU; This email address is being protected from spambots. You need JavaScript enabled to view it.

In this paper an opportunity to measure electrophysical characteristics of semiconductors in areas with sizes less than 100 nm is considered. The purpose of this work is development of analytical measuring complex based on atomic force microscope for local investigation of current-voltage and capacitance-voltage characteristics of semiconductor micro-and nanostructures. The measuring complex consists of atomic force microscope Ntegra Aura, pulse voltage generator, current-voltage converter, data acquisition and control board. Software to control devices included in analytical measuring complex and to process obtained data is developed. AFM tip is used as a contact to investigated samples. Performance of the analytical measuring complex is verified using test samples.

Key words: analytical measuring complex, current-voltage characteristics, capacitance-voltage characteristics, atomic force microscope, conductive AFM tip, semiconductors structures.

 Скачать статью