This email address is being protected from spambots. You need JavaScript enabled to view it.
 
+7 (4912) 72-03-73
 
Интернет-портал РГРТУ: http://rsreu.ru

UDC 537.311.322

THE DEVELOPMENT OF METHODS FOR STUDIES OF SEMICONDUCTOR MATERIALS AND DEVICE STRUCTURES FOR MICRO - AND NANOELECTRONICS

N. V. Vishnyakov, Ryazan state radio engineering university, department of micro- and nanoelectronics, assistant professor, PhD; This email address is being protected from spambots. You need JavaScript enabled to view it.
Yu. V. Vorobyov, Ryazan state radio engineering university, engineer; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. V. Gudzev, Ryazan state radio engineering university, department of micro- and nanoelectronics, assistant professor, PhD; This email address is being protected from spambots. You need JavaScript enabled to view it.
A. V. Ermachikhin, Ryazan state radio engineering university, department of micro- and nanoelectronics, senior researcher, PhD; This email address is being protected from spambots. You need JavaScript enabled to view it.
D. S. Kusakin, Ryazan state radio engineering university, department of micro- and nanoelectronics, engineer; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. G. Litvinov, Ryazan state radio engineering university, department of micro- and nanoelectronics, assistant professor, PhD; This email address is being protected from spambots. You need JavaScript enabled to view it.
A. D. Maslov, Ryazan state radio engineering university, department of micro- and nanoelectronics, graduate student; This email address is being protected from spambots. You need JavaScript enabled to view it.
V G. Mishustin, Ryazan state radio engineering university, department of micro- and nanoelectronics, assistant professor, PhD; This email address is being protected from spambots. You need JavaScript enabled to view it.
N. M. Tolkach, Ryazan state radio engineering university, department of micro- and nanoelectronics, graduate student; This email address is being protected from spambots. You need JavaScript enabled to view it.
T. A. Kholomina, Ryazan state radio engineering university, department of micro- and nanoelectronics, head of the department, full doctor, professor; This email address is being protected from spambots. You need JavaScript enabled to view it.

In this paper several diagnostic methods to investigate semiconductor micro- and nanostructures, developed by scientific school of department of micro- and nanoelectronics, are considered. The aim of this work is modification of existing and development of new methods to study and control electronic micro- and nanostructures, in particular, methods of scanning probe microscopy and spectroscopy, noise spectroscopy of electronic states, compensating the current of non-stationary photoconductivity. The features of these methods application are investigating objects such as structures based on non-crystalline semiconductors with low mobility of charge carriers, semiconductor structures with quantum wells and dots, other nanoobjects and micro- and nanostructured materials. These materials and stuctures are used in semiconductor
solar cells, optical sensors and light emitting devices, non-volatile phase-change memory devices, memristors and other devices of electronics.

Key words: micro- and nanostructures, experimental investigating methods. 

 Скачать статью