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LOCAL INVESTIGATION OF C-V CHARACTERISTICS OF A SOLAR CELL BASED ON p-Si WITH MODIFIED SURFACE

D. S. Kusakin, engineer, Ryazan state radio engineering university, department of micro- and nanoelectronics; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. G. Litvinov, assistant professor, PhD, Ryazan state radio engineering university, department of microand nanoelectronics; This email address is being protected from spambots. You need JavaScript enabled to view it.
N. B. Rybin, assistant professor, PhD, Ryazan state radio engineering university, department of micro- and nanoelectronics; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. S. Litvinova, assistant professor, PhD, Ryazan state radio engineering university, department telecommunications and the fundamentals of radio engineering; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. N. Shchelushkin, leading specialist «SOLEX-S» LLC, Ryazan, Russia
A. I. Khudysh , director «SOLEX-S» LLC, Ryazan, Russia

An automated measuring complex was developed for the local study of volt -faradic characteristics of semiconductor structures based on the probe system of an atomic force microscope. A technique for measuring electrical capacitance is described when contacting a sample surface with AFM probe. The aim of this work is to conduct studies of electrical properties of a semiconductor structure with developed surface relief used in the production of solar cells based on Si. Experimental C-V characteristics of a test sample with developed surface relief in the depth of the relief and on its elevation have been obtained. The charge carrier density profile for the test structure at the elevation and in the basin is constructed. A difference in the concentration of charge carriers in different regions of the test sample was observed.

Key words: measuring complex, C-V-characteristic, charge carrier concentration profile, atomic force
microscopy, solar cell, conductive probe AFM.

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