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UDC 539.198

CLUSTER ION ACCELERATOR AND ITS APPLICATION FOR HIGH-PRECISION SURFACE POLISHING

D. S. Kireev, post-graduate student, Physical Faculty, Lomonosov Moscow State University, Moscow; This email address is being protected from spambots. You need JavaScript enabled to view it.
A. V. Danilov, master student, Physical Faculty, Lomonosov Moscow State University, Moscow; This email address is being protected from spambots. You need JavaScript enabled to view it.
A. E. Ieshkin, Ph.D. (Phys. And Math.), senior researcher, Physical Faculty, Lomonosov Moscow State University, Moscow; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. S. Chernysh, Dr. Sc. (Phys. And Math.), full professor, Head of the Department, Physical Faculty, Lomonosov Moscow State University, Moscow; This email address is being protected from spambots. You need JavaScript enabled to view it.

This article gives detailed information about design and basic operation principles of cluster ion accelerator of the Lomonosov Moscow State University, which basic principle of cluster ions formation is the adiabatic expansion of the working gas through a supersonic nozzle. The aim of the work was to study the operating characteristics of the accelerator and the possibility of its use for high-precision polishing of the surface of a solid body on the example of germanium. It has been shown that cluster acceleration of argon ions with average sizes near a thousand atoms per cluster is possible at the existing accelerator. The ion beam current is several microamperes. The effect of background gas in a vacuum chamber on the transport of a beam to a target is investigated. The quantitative data on the roughness of the surface of germanium and silicon carbide after abrasive polishing and after irradiation with Arn + ions with the energy of 10 keV are presented.

Key words: ion beams, cluster ions, cluster ion accelerator, ion beam transport, sputtering, nanorelief, surface planarization, atomic-force microscopy.

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