UDC 621.387.322
CREATION AND RESEARCH OF MINIATURE IONIZATION VACUUM GAUGE OF ORBITRON TYPE
V. A. Korotchenko, Dr. Sc (Tech.), full professor, department of electronic devices, RSREU, Ryazan, Russia;
orcid.org/0000-0003-4068-768X, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. E. Skvortsov, CEO, MELZ, Zaprudnya; Russia;
orcid.org/0000-0002-3942-6450, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. K. Bazylev, Ph.D. (Tech.), associate professor, RSREU, Ryazan, Russia;
orcid.org/0000-0002-3580-3407, e-mail: bazylev.v.k@rsreu
V. V. Praded, engineer, department of electronic devices, RSREU, Ryazan, Russia;
orcid.org/0000-0001-6779-9476, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
A. M. Zhidkov, engineer, department of electronic devices, RSREU, Ryazan, Russia;
orcid.org/0000-0002-0199-8402, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
A miniature ionization vacuum gauge of orbitron type was created and studied. Diameter and length of ion collector is 16 and 32 mm, of anode – 0,5 and 30 mm, filament – 0,07 and 9 mm. Anode- collector voltage is 300 V, filament-collector – (10 – 30) V. Numerical simulation of electron motion has shown that particles travel along anode at spiral-shuttle trajectory with radius (1 – 6) mm, step ~ 9 mm, time on turn ~ 5 ns, shuttle period ~ 30 ns. Motion time is about 7 μs, number of turn is about 1500, path length ~ 1000 cm. We have experimentally proved that created orbitron gauge permits to measure pressure of gases in the range vetween (0,1 – 20) μTorr at filament emission current 5 μA and sensitivity 2000 Торр – 1, being three orders of magnitude higher than for ion manometer PMI-2, having working volume essentially (in 2,5 time) less. Gauge high measurement limit has shown to increase to 7 mTorr if screen potential rises from zero to 100 V. The aim of the work is to create miniature ionization orbitron gauge with high sensitivity and experimentally estimate its test vacuum sensor characteristics.
Key words: orbitron vacuum gauge, numerical simulation, сomputer modeling, motion of electrons, residual gas pressure measurement.