UDC 621. 387.322
STUDY THE IONIZATION GAGE FOR ULTRAHIGH VACUUM
V. K. Bazylev, Dr. Sc. (Tech.), associate professor, department of electronic devices, RSREU, Ryazan, Russia;
orcid.org/0000-0000-0000-000X, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. A. Korotchenko, Dr. Sc. (Tech.), full professor, department of electronic devices, RSREU, Ryazan, Russia;
orcid.org/0000-0000-0000-000X, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
A. M. Zhidkov, engineer, department of electronic devices, RSREU, Ryazan, Russia;
orcid.org/0000-0000-0000-000X, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. E. Skvortsov, General manager, MELZ, Zaprudnya; Russia;
orcid.org/0000-0000-0000-000X, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
accelerating electrodes, a collector located between them and an anode located perpendicular to gage axis has been studied. The accelerating electrodes are fed with voltage pulses with the amplitude of 300 V, the duration of 10 us and the pause of 1us, and the anode is fed with constant voltage of 5 V at average value of anode current equal to 1 uA. Calculated data that characterize the degree of increase in gauge manometric sensitivity are obtained, which is provided by various physical processes occurring in it: rotation of electrons around the lines of magnetic field induction, elastic scattering of electrons on gas molecules, excitation and ionization of molecules by electronic shock, secondary emission of electrons from anode surface. It was found that secondary emission can lead to multiple electron oscillations between the cathode and the anode (more than 1600 periods during voltage pulse on accelerating electrodes) and is the main factor determining high (1350 Torr-1) manometric gauge sensitivity registered in previous experiments [2]. The aim of the work is to assess the role of various physical processes in increasing manometric sensitivity of ionization gauge with low anode voltage that excludes x-ray radiation from the anode.
Key words: ultrahigh vacuum; ionization gauge; manometric sensitivity of ionization gauge, axial magnetic field; electron motion; secondary electron emission; soft x-ray radiation; computer simulation.