UDC: 539.211
STUDY OF SURFACE RELIEF FEATURES OF SILICON NANOCRYSTALLINE FILMS
A. Y. Sudakova, master student, RSREU, Ryazan, Russia;
orcid.org/0000-0002-5232-335X, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
N. V. Rybina, Ph.D. (in physics and mathematics), associate professor, RSREU, Ryazan, Russia;
orcid.org/0000-0003-0377-5605, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
SEM images of nanocrystalline silicon films surface were studied using two-dimensional detrended fluctuation analysis and average mutual information. The values of information-correlation characteristics of surface relief of the films studied are obtained. The aim of the work is to identify the dependence of the values in information-correlation characteristics of surface relief received from nanocrystalline silicon films subjected to laser annealing from laser radiation power.
Key words: surface, two-dimensional detrended fluctuation analysis, average mutual information method, nanocrystalline silicon, annealing, texturing, SEM images.