UDC 621. 387.322
MINIATURE ORBITRON VACUUM GAUGE WITH BINARY ANODE
V. A. Korotchenko, Dr.Sc. (Tech.), full professor, RSREU, Ryazan, Russia; orcid.org/0000-0003-4068-768X, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. E. Skvortsov, General manager, MELZ, Zaprudnya; Russia; orcid.org/0000-0002-3942-6450, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. K. Bazylev, Dr. Sc. (Tech.), associate professor, RSREU, Ryazan, Russia; orcid.org/0000-0002-3580-3407, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. V. Praded, engineer, RSREU, Ryazan, Russia; orcid.org/0000-0001-6779-9476, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
A. M. Zhidkov, engineer, RSREU, Ryazan, Russia; orcid.org/0000-0002-0199-8402, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
Miniature (volume~ 6 cm3 ) ionization vacuum gauge of orbitron type is developed. The anode of orbitron is made as two wolfram wires with 70 μm diameter, located parallel to gauge axis and being at the distance of 0,5 mm from the axis, much smaller than ion collector radii (8 mm). Diameter and length of the collector are 16 mm and 32 mm, accordingly, of the cathode – 70 μm and 9 mm. Potentials of anode and collector are zero, anode potential is 300 V, cathode potential is (5 – 15) V, cathode burning voltage is 1,6 V at the current of 0, 76 A, electron emission current – 5 μA. Binary anode is applied for thermal degasation (gas away) of electrodes. The numerical simulation has shown that electron trajectories have spiral-shuttle form (as at one wire anode). Spiral radius is (1 – 6) mm, step – (4 – 8) mm, rotation and shuttle periods – 6 ns and 30 ns, the number of turns and traveling time – 1500 and 7 µs, path length and energy – 1000 cm and (20 – 200) eV. It was experimentally confirmed that manometer sensitivity is about 1000 Torr– 1 , that is 1,5 orders of magnitude more than for PMI-2 ion manometer. The orbitron with binary anode is better than PMI-2 manometer because it has considerably less value of electron current (two orders of magnitude), cathode burning power (5 times) and work volume (3 times). The aim of the paper is the development of a highly sensitive miniature ionization orbitron gauge with binary anode and experimental estimation of test vacuum sensor characteristics.
Key words: orbitron vacuum gauge, numerical simulation, computer modeling, motion of electrons, residual gas pressure measurement.