UDC 004.932.2
SURFACE DEFECTS ANALYSIS BY INFORMATION-CORRELATION CHARACTERISTICS
N. V. Rybina, PhD. (in physics and mathematics), associate professor, department of Micro- and Nanoelectronics, RSREU, Ryazan, Russia; orcid.org/0000-0003-0377-5605, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
N. B. Rybin, PhD. (in physics and mathematics), associate professor, department of Micro- and Nanoelectronics, RSREU, Ryazan, Russia; orcid.org/0000-0003-2000-0158, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. D. Stepnov, post-graduate student, RSREU, Ryazan, Russia;
orcid.org/0009-0007-1945-751X, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
The methods of analyzing defects on the surface of solid-state materials from their images are considered. The results of processing images with various types of defects on the surface using fluctuation analysis and the method of average mutual information are presented.
Key words: : surface, image analysis, method of detrended fluctuation analysis (2D DFA), average mutual information (AMI), information and correlation characteristics.