UDC 620.179.1:621.385.64
IONIZATION GAGE FOR ULTRAHIGH VACUUM
V. K. Bazylev, Ph.D. (Tech.), associate professor, RSREU, Ryazan, Russia; This email address is being protected from spambots. You need JavaScript enabled to view it.
A. M. Zhidkov, engineer, department of electronic devices, RSREU, Ryazan, Russia; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. A. Korotchenko, Dr. Sc. (Tech.), full professor, RSREU, Ryazan, Russia; This email address is being protected from spambots. You need JavaScript enabled to view it.
V. E. Skvortsov, CEO, MELP, Zaprudnya, Russia; This email address is being protected from spambots. You need JavaScript enabled to view it.
An ionization gage for gas pressure measure for range with moderate to ultrahigh vacuum was developed. The operating principle of the gage is based on the ionization of gas molecules by electrons in a longitudinal magnetic field at the magnetic field above the critical that oscillate between cathode and anode after collision with molecules in the potential well formed by accelerating electrodes. The possibility of removing background current of ions collector conditioned to soft X-rays by significant decrease (to 5 volt) of voltage between cathode and anode was shown. It was experimentally proved that ion current dependence on nitrogen pressure in case on pulsed supply for accelerating electrodes in the range between 0,5 – 100 uTorr is linear in case of high-sensitivity of manometer.
Key words: ultrahigh vacuum, ionization gage, longitudinal magnetic field, potential well for electrons, soft X-rays, sensitivity of manometer.