UDC 53.083.91
COMPARISON OF DEEP LEVEL TRANSIENT SPECTROSCOPY METHODS OF RELAXATION CURRENT ANALYSIS
A. V. Ermachikhin, Ph.D. (Phys. and Math.), associate professor, department of Micro- and Nanoelectronics, RSREU, Ryazan, Russia; orcid.org/0000-0002-3808-9691, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
Yu. V. Vorobyov, Ph.D. (Phys. and Math.), senior researcher, RSREU, Ryazan, Russia;
orcid.org/0000-0001-5176-1166, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
E. P. Trusov, postgraduate student, engineer, RSREU, Ryazan, Russia;
orcid.org/0000-0003-1239-2702, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
V. G. Litvinov, Dr. Sc. (Phys. and Math.), associate professor, head of department of Micro- and Nanoelectronics, leading researcher, RSREU, Ryazan, Russia;
orcid.org/0000-0001-6122-8525, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
Three different approaches to processing of current relaxation under square-wave depletion signal are considered on the simulated data. Three different cases are considered: including 1, 2 or 3 deep levels varying signal-to-noise ratio. The present work aims at establishing applicability of those methods to particular experimental conditions. The Laplace-DLTS method was implemented via CONTIN software. The DISCRETE program was used to approximate the relaxation curves by the sum of exponentials. The integration method was used for this purpose as well. Classical DLTS analysis was implemented using the “Lock-in” and «GS-4» weighting methods.
Key words: DLTS, data processing, mathematical modeling, Laplace-DLTS, CONTIN, software.